Mortada Ossama, Blondy Pierre, Crunteanu Aurelian, Chatras Matthieu, Jean-Christophe Orlianges. A zinc dioxide-on-silicon MEMS resonator for narrowband filtering. In 21st IEEE International Conference on Electronics, Circuits and Systems, ICECS 2014, Marseille, France, December 7-10, 2014. pages 586-589, IEEE, 2014. [doi]
Abstract is missing.