Fang-Hsiang Su, Shi-Chung Chang, Chih-Min Fan, Ya-Jung Tsai, J. Jheng, Ching-Pin Kao, Chun-Yao Lu. A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing. In IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011. pages 433-438, IEEE, 2009. [doi]
Abstract is missing.