Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes

Renxin Wang, Bing Bai, Hengzhen Feng, Ziming Ren, Huiliang Cao, Chenyang Xue, Binzhen Zhang, Jun Liu. Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes. Sensors, 16(12):1991, 2016. [doi]

Abstract

Abstract is missing.