Micro-nano-integration based on automated serial assembly

Thomas Wich, Christoph Edeler, Christian Stolle, Sergej Fatikow. Micro-nano-integration based on automated serial assembly. In IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011. pages 573-578, IEEE, 2009. [doi]

Abstract

Abstract is missing.