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An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young's Modulus

Fei Yang, Dante J. Dorantes-Gonzalez, Kun Chen, Zimo Lu, Baoyin Jin, Yanning Li, Zhi Chen, Xiaotang Hu. An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young's Modulus. Sensors, 12(9):12208-12219, 2012. [doi]

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