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Consideration of the fringe effects of capacitors in micro accelerometer design

Wu Zhou 0003, Hongfang Lan, Huijun Yu, Liushan Lai, Bei Peng, Xiaoping He. Consideration of the fringe effects of capacitors in micro accelerometer design. Trans. Inst. Meas. Control, 40(9):2881-2886, 2018. [doi]

Authors

Wu Zhou 0003

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Hongfang Lan

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Huijun Yu

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Liushan Lai

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Bei Peng

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Xiaoping He

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