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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Claudio Abels, Vincenzo Mariano Mastronardi, Francesco Guido, Tommaso Dattoma, Antonio Qualtieri, William M. Megill, Massimo de Vittorio, Francesco Rizzi. Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics. Sensors, 17(5):1080, 2017. [doi]

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