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Simulation-based framework to automated wet-etch station scheduling problems in the semiconductor industry

Adrián M. Aguirre, Vanina G. Cafaro, Carlos A. Méndez. Simulation-based framework to automated wet-etch station scheduling problems in the semiconductor industry. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1821-1833, WSC, 2011. [doi]

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Adrián M. Aguirre

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Vanina G. Cafaro

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Carlos A. Méndez

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