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Fully-differential AlN-on-Si wine glass mode resonator for enhanced characterization in water

Abid Ali, Joshua E.-Y. Lee. Fully-differential AlN-on-Si wine glass mode resonator for enhanced characterization in water. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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