Modal Analysis of Microgrippers used in Assembly of MEMS Devices

Yasser H. Anis, William L. Cleghorn, James K. Mills. Modal Analysis of Microgrippers used in Assembly of MEMS Devices. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 281-286, IEEE Computer Society, 2005. [doi]

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