3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer

Sho Asano, Masanori Muroyama, Takahiro Nakayama, Yoshiyuki Hata, Yutaka Nonomura, Shuji Tanaka. 3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer. Sensors, 17(11):2451, 2017. [doi]

@article{AsanoMNHNT17,
  title = {3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer},
  author = {Sho Asano and Masanori Muroyama and Takahiro Nakayama and Yoshiyuki Hata and Yutaka Nonomura and Shuji Tanaka},
  year = {2017},
  doi = {10.3390/s17112451},
  url = {https://doi.org/10.3390/s17112451},
  researchr = {https://researchr.org/publication/AsanoMNHNT17},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {17},
  number = {11},
  pages = {2451},
}