On-Demand MEMS Device Production System by Module-Based Microfactory

Kiwamu Ashida, Shizuka Nakano, Jaehyuk Park, Jun Akedo. On-Demand MEMS Device Production System by Module-Based Microfactory. IJAT, 4(2):110-116, 2010. [doi]

Authors

Kiwamu Ashida

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Shizuka Nakano

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Jaehyuk Park

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Jun Akedo

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