Towards building OPC-UA companions for semi-conductor domain

Selma Azaiez, François Tanguy, Marc Engel. Towards building OPC-UA companions for semi-conductor domain. In 24th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2019, Zaragoza, Spain, September 10-13, 2019. pages 142-149, IEEE, 2019. [doi]

Authors

Selma Azaiez

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François Tanguy

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Marc Engel

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