A novel test structure for OxRRAM process variability evaluation

Hassen Aziza, Marc Bocquet, Jean Michel Portal, M. Moreau, Christophe Muller. A novel test structure for OxRRAM process variability evaluation. Microelectronics Reliability, 53(9-11):1208-1212, 2013. [doi]

Authors

Hassen Aziza

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Marc Bocquet

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Jean Michel Portal

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M. Moreau

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Christophe Muller

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