MEMS stiction supression with sacrificial polystyrene nanoparticles

A. Banerjee, S. S. Pandey, Carlos H. Mastrangelo. MEMS stiction supression with sacrificial polystyrene nanoparticles. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

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