Simulation and optical measurement of MEMS thermal actuator sub-micron displacements in air and water - researchr publication authors

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Bruno Barazani, Stephan Warnat, Ted Hubbard. Simulation and optical measurement of MEMS thermal actuator sub-micron displacements in air and water. In IEEE 28th Canadian Conference on Electrical and Computer Engineering, CCECE 2015, Halifax, NS, Canada, May 3-6, 2015. pages 1-6, IEEE, 2015. [doi]

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