CMOS-Based Monolithic Controllers for Smart Sensors Comprising Micromembranes and Microcantilevers

Diego Ruben Barrettino, Piero Malcovati, Markus Graf, Sadik Hafizovic, Andreas Hierlemann. CMOS-Based Monolithic Controllers for Smart Sensors Comprising Micromembranes and Microcantilevers. IEEE Trans. on Circuits and Systems, 54-I(1):141-152, 2007. [doi]

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