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2 deposition from TMP in APCVD

L. D. Bartholomew, N. M. Gralenski, J. C. Sisson, G. U. Pignatel. 2 deposition from TMP in APCVD. European Transactions on Telecommunications, 1(2):167-172, 1990. [doi]

Authors

L. D. Bartholomew

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N. M. Gralenski

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J. C. Sisson

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G. U. Pignatel

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