Electrostatically Actuated SOI In-Plane Motion Platform for In-Situ Calibration of Micro Gyroscopes - researchr publication authors

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Erez Benjamin, Ronen Maimon, Aviv Ronen, Eldad Yichie, Slava Krylov. Electrostatically Actuated SOI In-Plane Motion Platform for In-Situ Calibration of Micro Gyroscopes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

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