Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method - researchr publication authors

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Paula Lalucci Berton, Jose Henrique Galeti, Ricardo Tokio Higuti, Cláudio Kitano, Emilio Carlos Nelli Silva. Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2014, Proceedings, Montevideo, Uruguay, May 12-15, 2014. pages 1533-1536, IEEE, 2014. [doi]

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