Experimental Analysis of Laser Interferometry-Based Robust Motion Tracking Control of a Flexure-Based Mechanism

Umesh Bhagat, Bijan Shirinzadeh, Yanling Tian, Dawei Zhang. Experimental Analysis of Laser Interferometry-Based Robust Motion Tracking Control of a Flexure-Based Mechanism. IEEE T. Automation Science and Engineering, 10(2):267-275, 2013. [doi]

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