Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I - Theory

Elena Blokhina, Joan Pons, Jordi Ricart, Orla Feely, Manuel Domínguez Pumar. Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I - Theory. IEEE Trans. on Circuits and Systems, 57-I(8):1865-1878, 2010. [doi]

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