Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms

Ekkard Brinksmeier, Frank Vollertsen, Oltmann Riemer, Michael Koerdt, Axel Meier, Simon Kibben, Jan Möller. Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms. Production Engineering, 7(6):619-627, 2013. [doi]

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