3D Model Registration-Based Batch Wafer-ID Recognition Algorithm

Fang Cao, Zengguo Tian, Baozhu Jiang, Hongshuai Zhang, Heng Chen, Xuguang Zhu. 3D Model Registration-Based Batch Wafer-ID Recognition Algorithm. IEEE Access, 9:150283-150291, 2021. [doi]

Authors

Fang Cao

This author has not been identified. Look up 'Fang Cao' in Google

Zengguo Tian

This author has not been identified. Look up 'Zengguo Tian' in Google

Baozhu Jiang

This author has not been identified. Look up 'Baozhu Jiang' in Google

Hongshuai Zhang

This author has not been identified. Look up 'Hongshuai Zhang' in Google

Heng Chen

This author has not been identified. Look up 'Heng Chen' in Google

Xuguang Zhu

This author has not been identified. Look up 'Xuguang Zhu' in Google