Domenico Caputo, Fernanda Irrera. On the reliability of ZrO::2:: films for VLSI applications. Microelectronics Reliability, 44(5):739-745, 2004. [doi]
@article{CaputoI04,
title = {On the reliability of ZrO::2:: films for VLSI applications},
author = {Domenico Caputo and Fernanda Irrera},
year = {2004},
doi = {10.1016/j.microrel.2003.12.012},
url = {http://dx.doi.org/10.1016/j.microrel.2003.12.012},
tags = {reliability},
researchr = {https://researchr.org/publication/CaputoI04},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {44},
number = {5},
pages = {739-745},
}