Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor Manufacturing - researchr publication authors

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Mattia Carletti, Marco Maggipinto, Alessandro Beghi, Gian Antonio Susto, Natalie Gentner, Yao Yang, Andreas Kyek. Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor Manufacturing. In Winter Simulation Conference, WSC 2020, Orlando, FL, USA, December 14-18, 2020. pages 1875-1885, IEEE, 2020. [doi]

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