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Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density

Albert H. Chang, Kewei Zuo, Jean Wang, Douglas Yu, Duane S. Boning. Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density. In Keith A. Bowman, Kamesh V. Gadepally, Pallab Chatterjee, Mark M. Budnik, Lalitha Immaneni, editors, Thirteenth International Symposium on Quality Electronic Design, ISQED 2012, Santa Clara, CA, USA, March 19-21, 2012. pages 185-192, IEEE, 2012. [doi]

Authors

Albert H. Chang

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Kewei Zuo

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Jean Wang

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Douglas Yu

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Duane S. Boning

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