Markov-chain based missing value estimation method for tool commonality analysis in semiconductor manufacturing

Rong-Huei Chen, Chih-Ming Fan. Markov-chain based missing value estimation method for tool commonality analysis in semiconductor manufacturing. In Oliver Rose, Adelinde M. Uhrmacher, editors, Winter Simulation Conference, WSC '12, Berlin, Germany, December 9-12, 2012. pages 198, WSC, 2012. [doi]

@inproceedings{ChenF12-6,
  title = {Markov-chain based missing value estimation method for tool commonality analysis in semiconductor manufacturing},
  author = {Rong-Huei Chen and Chih-Ming Fan},
  year = {2012},
  url = {http://dl.acm.org/citation.cfm?id=2430024},
  researchr = {https://researchr.org/publication/ChenF12-6},
  cites = {0},
  citedby = {0},
  pages = {198},
  booktitle = {Winter Simulation Conference, WSC '12, Berlin, Germany, December 9-12, 2012},
  editor = {Oliver Rose and Adelinde M. Uhrmacher},
  publisher = {WSC},
}