Determination of the thermal conductivity of composite low-k dielectrics for advanced interconnect structures

F. Chen, J. Gill, D. Harmon, T. Sullivan, A. Strong, B. Li, H. Rathore, Daniel C. Edelstein. Determination of the thermal conductivity of composite low-k dielectrics for advanced interconnect structures. Microelectronics Reliability, 46(2-4):232-243, 2006. [doi]

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