Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism - researchr publication authors

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Mei-Yung Chen, Hsuan-Han Huang, Shao-Kang Hung, Li-Chen Fu. Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism. In American Control Conference, ACC 2006, Minneapolis, MN, USA, 14-16 June, 2006. IEEE, 2006. [doi]

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