Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling

Shouhong Chen, Zhentao Huang, Tao Wang, Xingna Hou, Jun Ma 0031. Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling. J. Intelligent Manufacturing, 36(1):271-284, January 2025. [doi]

Authors

Shouhong Chen

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Zhentao Huang

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Tao Wang

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Xingna Hou

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Jun Ma 0031

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