Recent Progress in MEMS Fiber-Optic Fabry-Perot Pressure Sensors

Ye Chen, Dongqin Lu, Huan Xing, Haotian Ding, Junxian Luo, Hanwen Liu, Xiangxu Kong, Fei Xu. Recent Progress in MEMS Fiber-Optic Fabry-Perot Pressure Sensors. Sensors, 24(4):1079, February 2024. [doi]

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