Frequency and Quality Factor Matched 2-Axis Dual Mass Resonator

Jianlin Chen, Takashiro Tsukamoto, Giacomo Langfelder, Shuji Tanaka. Frequency and Quality Factor Matched 2-Axis Dual Mass Resonator. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]

Authors

Jianlin Chen

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Takashiro Tsukamoto

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Giacomo Langfelder

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Shuji Tanaka

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