Wen-Chin Chen, Yi-Chia Tai, Min-Wen Wang, Hsiang-Cheng Tsai. Parameter optimization of etching process for a LGP stamper. Neural Computing and Applications, 23(6):1539-1550, 2013. [doi]
@article{ChenTWT13,
title = {Parameter optimization of etching process for a LGP stamper},
author = {Wen-Chin Chen and Yi-Chia Tai and Min-Wen Wang and Hsiang-Cheng Tsai},
year = {2013},
doi = {10.1007/s00521-012-1103-2},
url = {http://dx.doi.org/10.1007/s00521-012-1103-2},
researchr = {https://researchr.org/publication/ChenTWT13},
cites = {0},
citedby = {0},
journal = {Neural Computing and Applications},
volume = {23},
number = {6},
pages = {1539-1550},
}