A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry

Junying Chen, Boxuan Wang, Xiuyu Chen, Qingshan Jiang, Wei Feng, Zhilong Xu, Zhenye Zhao. A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry. Sensors, 23(19):8307, October 2023. [doi]

Authors

Junying Chen

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Boxuan Wang

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Xiuyu Chen

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Qingshan Jiang

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Wei Feng

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Zhilong Xu

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Zhenye Zhao

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