Using IoT technology for computer-integrated manufacturing systems in the semiconductor industry

Yu-Qiang Chen, Biao Zhou, Mingming Zhang, Chien-Ming Chen. Using IoT technology for computer-integrated manufacturing systems in the semiconductor industry. Appl. Soft Comput., 89:106065, 2020. [doi]

Authors

Yu-Qiang Chen

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Biao Zhou

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Mingming Zhang

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Chien-Ming Chen

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