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Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning

Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu, Yi-Hao Yeh. Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1898-1907, WSC, 2011. [doi]

Authors

Chen-Fu Chien

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Ying-Jen Chen

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Chia-Yu Hsu

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Yi-Hao Yeh

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