A data mining approach for analyzing semiconductor MES and FDC data to enhance overall usage effectiveness (OUE)

Chen-Fu Chien, Alejandra Campero Diaz, Yu-Bin Lan. A data mining approach for analyzing semiconductor MES and FDC data to enhance overall usage effectiveness (OUE). Int. J. Computational Intelligence Systems, 7(sup2):52-65, 2014. [doi]

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