Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process - researchr publication authors

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Jin-Chern Chiou, Lei-Chun Chou, You-Liang Lai, Sheng-Chieh Huang. Thermal switch and variable capacitance designed for micro electrostatic converter by using CMOS MEMS process. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 733-737, IEEE, 2012. [doi]

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