Young Seek Cho. Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge. J. Inform. and Commun. Convergence Engineering, 15(4), 2017. [doi]
@article{Cho17-9,
title = {Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge},
author = {Young Seek Cho},
year = {2017},
doi = {10.6109/jicce.2017.15.4.232},
url = {https://doi.org/10.6109/jicce.2017.15.4.232},
researchr = {https://researchr.org/publication/Cho17-9},
cites = {0},
citedby = {0},
journal = {J. Inform. and Commun. Convergence Engineering},
volume = {15},
number = {4},
}