Joonhyuk Cho, Gangmin Cho, Youngsoo Shin. Optimization of Machine Learning Guided Optical Proximity Correction. In IEEE 61st International Midwest Symposium on Circuits and Systems, MWSCAS 2018, Windsor, ON, Canada, August 5-8, 2018. pages 921-924, IEEE, 2018. [doi]
@inproceedings{ChoCS18,
title = {Optimization of Machine Learning Guided Optical Proximity Correction},
author = {Joonhyuk Cho and Gangmin Cho and Youngsoo Shin},
year = {2018},
doi = {10.1109/MWSCAS.2018.8623985},
url = {https://doi.org/10.1109/MWSCAS.2018.8623985},
researchr = {https://researchr.org/publication/ChoCS18},
cites = {0},
citedby = {0},
pages = {921-924},
booktitle = {IEEE 61st International Midwest Symposium on Circuits and Systems, MWSCAS 2018, Windsor, ON, Canada, August 5-8, 2018},
publisher = {IEEE},
isbn = {978-1-5386-7392-8},
}