Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM - researchr publication authors

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Yun-Ju Chuang, Pei-Ru Chen, Wei-Rui Lin, Fu-Ron Chen. Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 494-497, IEEE, 2013. [doi]

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