Micromechanical voltage reference using the pull-in of a beam

Edmond Cretu, Luis Alexandre Rocha, Reinoud F. Wolffenbuttel. Micromechanical voltage reference using the pull-in of a beam. IEEE T. Instrumentation and Measurement, 50(6):1504-1507, 2001. [doi]

Authors

Edmond Cretu

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Luis Alexandre Rocha

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Reinoud F. Wolffenbuttel

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