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The Generation Mechanism of Tracking Error During Acceleration or Deceleration Phase in Ultraprecision Motion Systems

Luyao Dai, Xin Li, Yu Zhu, Ming Zhang, Chuxiong Hu. The Generation Mechanism of Tracking Error During Acceleration or Deceleration Phase in Ultraprecision Motion Systems. IEEE Transactions on Industrial Electronics, 66(9):7109-7119, 2019. [doi]

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