Study on the influence of doping process on resistance of semiconductor bridge region

Youqi Deng, Liang Zhang, Wei Zhang. Study on the influence of doping process on resistance of semiconductor bridge region. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 190-193, IEEE, 2020. [doi]

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