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Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor

Anthony Dickherber, Christopher D. Corso, William Hunt. Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor. In 28th International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2006, New York City, NY, USA, August 30 - September 3, 2006, Main Volume. pages 4590-4593, IEEE, 2006. [doi]

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Anthony Dickherber

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Christopher D. Corso

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William Hunt

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