A safety system for dynamic vacuum liquid nitrogen pipeline - for world class manufacturing operation in semiconductor industry

Vinayak Divate, Pichit Saengpongpaew. A safety system for dynamic vacuum liquid nitrogen pipeline - for world class manufacturing operation in semiconductor industry. In Juan Andrade-Cetto, Jean-Louis Ferrier, José Dias Pereira, Joaquim Filipe, editors, ICINCO 2006, Proceedings of the Third International Conference on Informatics in Control, Automation and Robotics, Signal Processing, Systems Modeling and Control, Setúbal, Portugal, August 1-5, 2006. pages 148-153, INSTICC Press, 2006.

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