An experimental study on MEMS-based gas flow sensor for wide range flow measurements - researchr publication authors

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N. A. Djuzhev, D. V. Novikov, G. D. Demin, A. I. Ovodov, V. T. Ryabov. An experimental study on MEMS-based gas flow sensor for wide range flow measurements. In 2018 IEEE Sensors Applications Symposium, SAS 2018, Seoul, South Korea, March 12-14, 2018. pages 1-4, IEEE, 2018. [doi]

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