Application of MEMS technologies to nanodevices

Lance Doherty, Hongbing Liu, Veljko Milanovic. Application of MEMS technologies to nanodevices. In ISCAS (3). pages 934-937, 2003. [doi]

@inproceedings{DohertyLM03,
  title = {Application of MEMS technologies to nanodevices},
  author = {Lance Doherty and Hongbing Liu and Veljko Milanovic},
  year = {2003},
  doi = {10.1109/ISCAS.2003.1205174},
  url = {http://dx.doi.org/10.1109/ISCAS.2003.1205174},
  researchr = {https://researchr.org/publication/DohertyLM03},
  cites = {0},
  citedby = {0},
  pages = {934-937},
  booktitle = {ISCAS (3)},
}