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Parylene-MEMS technique-based flexible electronics

Xiao Dong, Meixuan Zhang, YinHua Lei, Zhihong Li, Yufeng Jin, Wei Wang. Parylene-MEMS technique-based flexible electronics. Science in China Series F: Information Sciences, 61(6), 2018. [doi]

Authors

Xiao Dong

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Meixuan Zhang

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YinHua Lei

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Zhihong Li

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Yufeng Jin

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Wei Wang

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